Invention Grant
- Patent Title: Additively manufactured gas distribution manifold
-
Application No.: US15087889Application Date: 2016-03-31
-
Publication No.: US10215317B2Publication Date: 2019-02-26
- Inventor: Christopher William Burkhart , Andrew C. Lee , David J. Hemker
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Weaver Austin Villeneuve & Sampson LLP
- Main IPC: F16L25/00
- IPC: F16L25/00 ; F16L23/14 ; H01L21/67 ; B33Y10/00 ; B22F7/04 ; F16L9/00 ; F16L13/00 ; F16L47/14 ; F16L3/00 ; F16L51/02 ; F16L43/00 ; F16L41/02 ; B33Y80/00 ; B22F3/00 ; B22F3/105
Abstract:
Methods and apparatuses for additively manufactured tubular passages, additively manufactured manifolds, and additively manufactured heaters are provided.
Public/Granted literature
- US20170203511A1 ADDITIVELY MANUFACTURED GAS DISTRIBUTION MANIFOLD Public/Granted day:2017-07-20
Information query
