- Patent Title: Position detection apparatus, lens apparatus, image pickup system, machine tool apparatus, exposure apparatus, position detection method, and non-transitory computer-readable storage medium which are capable of detecting reference position with high accuracy
-
Application No.: US14992385Application Date: 2016-01-11
-
Publication No.: US10215596B2Publication Date: 2019-02-26
- Inventor: Chihiro Nagura
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2015-006643 20150116; JP2015-223899 20151116
- Main IPC: G01D5/34
- IPC: G01D5/34 ; G01D5/347 ; G01D5/245
Abstract:
A position detection apparatus detects a position of an object, and the position detection apparatus includes a detector, a scale having a periodic pattern, the scale and the detector being movable relatively to each other, and a signal processor configured to generate a reference signal indicating a reference position of the scale, and the signal processor is configured to generate the reference signal based on a ratio of a first phase signal and a second phase signal from the detector.
Public/Granted literature
Information query
IPC分类:
