Invention Grant
- Patent Title: Material property measurements using multiple frequency atomic force microscopy
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Application No.: US15064405Application Date: 2016-03-08
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Publication No.: US10215773B2Publication Date: 2019-02-26
- Inventor: Roger Proksch , Roger Callahan
- Applicant: OXFORD INSTRUMENTS PLC , OXFORD INSTRUMENTS AFM INC.
- Assignee: Oxford Instruments AFM Inc
- Current Assignee: Oxford Instruments AFM Inc
- Agency: Law Office of Scott C Harris Inc
- Main IPC: G01Q20/00
- IPC: G01Q20/00 ; G01Q60/24 ; G01Q60/32
Abstract:
Apparatus and techniques for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work are described. Similar apparatus and techniques for extracting information using contact resonance with multiple excitation signals are also described.
Public/Granted literature
- US20160258980A1 Material Property Measurements Using Multiple Frequency Atomic Force Microscopy Public/Granted day:2016-09-08
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