Invention Grant
- Patent Title: Inductive spin-orbit torque device and method for fabricating the same
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Application No.: US15722118Application Date: 2017-10-02
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Publication No.: US10217500B1Publication Date: 2019-02-26
- Inventor: Yann-Wen Lan , Qiming Shao , Guoqiang Yu , Kang-Lung Wang , Wen-Kuan Yeh
- Applicant: NATIONAL APPLIED RESEARCH LABORATORIES
- Applicant Address: TW Taipei
- Assignee: National Applied Research Laboratories
- Current Assignee: National Applied Research Laboratories
- Current Assignee Address: TW Taipei
- Agency: Rosenberg, Klein & Lee
- Main IPC: G11C11/00
- IPC: G11C11/00 ; G11C11/16 ; G11C11/14 ; G11C11/56 ; C23C16/06 ; C23C14/34

Abstract:
The present invention relates to an inductive spin-orbit torque device and the method for fabricating the same. The method comprises steps of depositing a two-dimensional thin film using chemical vapor deposition (CVD) and sputtering a ferromagnetic material on the thin film. The crystal structure of the two-dimensional thin film includes at least one lattice plane arranged asymmetrically. The thickness of the two-dimensional thin film includes at least one unit-cell layer. The sum of the at least one unit-cell layer is an odd number. By using the vertical magnetic torque generated by the two-dimensional thin film and the miniaturization in thickness, the device size and the fabrication costs may be reduced.
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