Invention Grant
- Patent Title: Static random access memory device with halo regions having different impurity concentrations
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Application No.: US16014920Application Date: 2018-06-21
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Publication No.: US10217751B2Publication Date: 2019-02-26
- Inventor: Koji Nii , Makoto Yabuuchi , Yasumasa Tsukamoto , Kengo Masuda
- Applicant: RENESAS ELECTRONICS CORPORATION
- Applicant Address: JP Tokyo
- Assignee: RENESAS ELECTRONICS CORPORATION
- Current Assignee: RENESAS ELECTRONICS CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: McDermott Will & Emery LLP
- Main IPC: H01L27/088
- IPC: H01L27/088 ; H01L27/11 ; G11C11/412 ; H01L29/10 ; H01L29/66 ; H01L21/265 ; H01L27/02

Abstract:
In a region just below an access gate electrode in an SRAM memory cell, a second halo region is formed adjacent to a source-drain region and a first halo region is formed adjacent to a first source-drain region. In a region just below a drive gate electrode, a third halo region is formed adjacent to the third source-drain region and a fourth halo region is formed adjacent to a fourth source-drain region. The second halo region is set to have an impurity concentration higher than the impurity concentration of the first halo region. The third halo region is set to have an impurity concentration higher than the impurity concentration of the fourth halo region. The impurity concentration of the first halo region and the impurity concentration of the fourth halo region are different from each other.
Public/Granted literature
- US20180342522A1 STATIC RANDOM ACCESS MEMORY DEVICE WITH HALO REGIONS HAVING DIFFERENT IMPURITY CONCENTRATIONS Public/Granted day:2018-11-29
Information query
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