Invention Grant
- Patent Title: Semiconductor device and method of manufacturing the same
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Application No.: US15720120Application Date: 2017-09-29
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Publication No.: US10217854B1Publication Date: 2019-02-26
- Inventor: Yung-Hao Lin , Shin-Cheng Lin , Hsin-Chih Lin
- Applicant: Vanguard International Semiconductor Corporation
- Applicant Address: TW Hsinchu
- Assignee: VANGUARD INTERNATIONAL SEMICONDUCTOR CORPORATION
- Current Assignee: VANGUARD INTERNATIONAL SEMICONDUCTOR CORPORATION
- Current Assignee Address: TW Hsinchu
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Main IPC: H01L29/20
- IPC: H01L29/20 ; H01L29/778 ; H01L29/205 ; H01L29/66 ; H01L29/78

Abstract:
The embodiments of the present disclosure provide a semiconductor device. The semiconductor device includes a first III-V compound layer disposed over a substrate and a second III-V compound layer disposed over the first III-V compound layer, wherein a first carrier channel is formed in the interface between the first III-V compound layer and the second III-V compound layer. The semiconductor device also includes a third III-V compound layer disposed over the second III-V compound layer and a fourth III-V compound layer disposed over the third III-V compound layer, wherein a second carrier channel is formed in an interface between the third III-V compound layer and the fourth III-V compound layer. The semiconductor device includes a gate structure and S/D regions disposed on two opposite sides of the gate structure, wherein the first carrier channel and the second carrier channel are extended between the S/D regions.
Information query
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