Silicone rubber material for soft lithography
Abstract:
The present invention relates to a silicone rubber like material and a printing device including a stamp layer comprising such a material. The material is suitable for use in soft lithography as it enables stable features having dimensions in the nanometer range to be obtained on a substrate, and also allows for the accommodation onto rough and non-flat substrate surfaces. The invention also relates to methods for manufacturing the silicone rubber like material and stamp layer and use thereof in lithographic processes.
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