Invention Grant
- Patent Title: Silicone rubber material for soft lithography
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Application No.: US14697687Application Date: 2015-04-28
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Publication No.: US10220563B2Publication Date: 2019-03-05
- Inventor: Marcus Antonius Verschuuren
- Applicant: KONINKLIJKE PHILIPS N.V.
- Applicant Address: NL Eindhoven
- Assignee: KONINKLIJKE PHILIPS N.V.
- Current Assignee: KONINKLIJKE PHILIPS N.V.
- Current Assignee Address: NL Eindhoven
- Agent Larry Liberchuk
- Priority: EP08157807 20080602
- Main IPC: B29C59/00
- IPC: B29C59/00 ; G03F7/00 ; B29C59/02 ; B41N1/12 ; B82Y10/00 ; B82Y40/00 ; C08L83/04 ; B41C1/08 ; C08G77/12 ; C08G77/20 ; C08G77/00 ; B29K83/00

Abstract:
The present invention relates to a silicone rubber like material and a printing device including a stamp layer comprising such a material. The material is suitable for use in soft lithography as it enables stable features having dimensions in the nanometer range to be obtained on a substrate, and also allows for the accommodation onto rough and non-flat substrate surfaces. The invention also relates to methods for manufacturing the silicone rubber like material and stamp layer and use thereof in lithographic processes.
Public/Granted literature
- US20150239171A1 SILICONE RUBBER MATERIAL FOR SOFT LITHOGRAPHY Public/Granted day:2015-08-27
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