Invention Grant
- Patent Title: Ink jet print head and method of manufacturing the same
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Application No.: US15697746Application Date: 2017-09-07
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Publication No.: US10220618B2Publication Date: 2019-03-05
- Inventor: Kinya Ashikaga
- Applicant: ROHM Co., LTD.
- Applicant Address: JP Kyoto
- Assignee: ROHM CO., LTD.
- Current Assignee: ROHM CO., LTD.
- Current Assignee Address: JP Kyoto
- Agency: Chip Law Group
- Priority: JP2016-183173 20160920
- Main IPC: B41J2/14
- IPC: B41J2/14 ; B41J2/16 ; H01L41/047 ; H01L41/293 ; H01L41/332 ; H01L41/318

Abstract:
A ink jet print head includes an actuator substrate having an ink flow path including a pressure chamber, a movable membrane forming layer including a movable membrane disposed on the pressure chamber and defining a ceiling surface portion of the pressure chamber, a piezoelectric element formed on the movable membrane and including a lower electrode, a piezoelectric film formed on the lower electrode and an upper electrode formed on the piezoelectric film, with the pressure chamber, the movable membrane and the upper electrode having a rectangular shape elongated in one direction in plan view as viewed from a direction normal to the movable membrane, the lower electrode including a main electrode section constituting the piezoelectric element and an extension section extending from the main electrode section along a surface of the movable membrane forming layer, and a dimension measuring pattern related to the pressure chamber.
Public/Granted literature
- US20180079210A1 INK JET PRINT HEAD AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2018-03-22
Information query
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