Invention Grant
- Patent Title: Optical module
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Application No.: US15025691Application Date: 2014-09-08
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Publication No.: US10221061B2Publication Date: 2019-03-05
- Inventor: Yoshihisa Warashina
- Applicant: HAMAMATSU PHOTONICS K.K.
- Applicant Address: JP Hamamatsu-shi, Shizuoka
- Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee Address: JP Hamamatsu-shi, Shizuoka
- Agency: Drinker Biddle & Reath LLP
- Priority: JP2013-206686 20131001
- International Application: PCT/JP2014/073712 WO 20140908
- International Announcement: WO2015/049958 WO 20150409
- Main IPC: G02B26/00
- IPC: G02B26/00 ; B81B3/00 ; H02N1/00 ; G01J3/26 ; G02B6/293 ; G02B26/08

Abstract:
An optical module includes a semiconductor substrate, an electrostatic actuator including a fixed portion fixed to the semiconductor substrate and a movable portion moved with respect to the fixed portion by an electrostatic force generated between the movable portion and the fixed portion, a first spring portion connected to the movable portion and having a first spring constant K1, a second spring portion connected between the first spring portion and the semiconductor substrate and having a second spring constant K2 greater than the first spring constant K1, and a movable mirror which is an optical component connected to a connection portion between the first spring portion and the second spring portion.
Public/Granted literature
- US20160244320A1 OPTICAL MODULE Public/Granted day:2016-08-25
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