Invention Grant
- Patent Title: Multi-level getter structure and encapsulation structure comprising such a multi-level getter structure
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Application No.: US14966450Application Date: 2015-12-11
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Publication No.: US10221063B2Publication Date: 2019-03-05
- Inventor: Xavier Baillin
- Applicant: Commissariat A L'Energie Atomique et aux Energies Alternatives
- Applicant Address: FR Paris
- Assignee: Commissariat à l'énergie atomique et aux énergies alternatives
- Current Assignee: Commissariat à l'énergie atomique et aux énergies alternatives
- Current Assignee Address: FR Paris
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR1462587 20141217
- Main IPC: H01L23/20
- IPC: H01L23/20 ; B81B7/00 ; B81C1/00
Abstract:
A getter structure is provided, including a support; a first layer of getter material disposed on the support a second layer of getter material, the first layer of getter material being disposed between the support and the second layer of getter material; a first portion of material mechanically connecting a first face of the second layer of getter material to a first face of the first layer of getter material and forming at least one first space between the first faces of the first and second layers of getter material configured to allow a circulation of gas between the first faces of the first and second layers of getter material; and a first opening crossing through at least the second layer of getter material and emerging into the first space.
Public/Granted literature
- US20160176703A1 MULTI-LEVEL GETTER STRUCTURE AND ENCAPSULATION STRUCTURE COMPRISING SUCH A MULTI-LEVEL GETTER STRUCTURE Public/Granted day:2016-06-23
Information query
IPC分类:
