Invention Grant
- Patent Title: Coating insulating materials for improved life
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Application No.: US13908320Application Date: 2013-06-03
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Publication No.: US10221476B2Publication Date: 2019-03-05
- Inventor: Craig R. Chaney , Neil J. Bassom
- Applicant: Varian Semiconductor Equipment Associates, Inc.
- Applicant Address: US MA Gloucester
- Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee Address: US MA Gloucester
- Agency: Nields, Lemack & Frame, LLC
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01J37/32 ; C23C14/48 ; C23C14/56 ; H01J37/317

Abstract:
A system for extending the life of insulating components disposed within a housing, such as an ion implanter, is disclosed. The system includes one or more insulating components, disposed in the housing, which are coated with a diamond like carbon (DLC) coating. The insulating components may be bushings or any insulating component used to electrically isolate two components having different voltage potentials, such as electrodes. This DLC coating retards the deposition of metals, such as those contained in the ion source, on the insulating components. This reduces the likelihood or electrical arcing or other phenomenon that affect the useful life of these insulating component.
Public/Granted literature
- US20140352617A1 Coating Insulating Materials For Improved Life Public/Granted day:2014-12-04
Information query
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