Invention Grant
- Patent Title: Metal complexes containing amidoimine ligands
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Application No.: US15032559Application Date: 2014-10-24
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Publication No.: US10221481B2Publication Date: 2019-03-05
- Inventor: Ravi Kanjolia , Shaun Garratt , David Thompson , Jeffrey Anthis
- Applicant: SAFC HITECH INC.
- Applicant Address: DE Darmstadt
- Assignee: MERCK PATENT GMBH
- Current Assignee: MERCK PATENT GMBH
- Current Assignee Address: DE Darmstadt
- Agency: Harness, Dickey and Pierce, P.L.C.
- International Application: PCT/US2014/062108 WO 20141024
- International Announcement: WO2015/065823 WO 20150507
- Main IPC: C23C16/00
- IPC: C23C16/00 ; C23C16/455 ; C07F13/00 ; C23C16/18 ; C23C16/34 ; C23C16/40 ; H01L21/285
Abstract:
Metal complexes containing one or more amidoimine ligands, methods of making such metal complexes, and methods of using such metal complexes to prepare metal-containing films are provided.
Public/Granted literature
- US20180291503A2 METAL COMPLEXES CONTAINING AMIDOIMINE LIGANDS Public/Granted day:2018-10-11
Information query
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