Invention Grant

Vacuum pump
Abstract:
A vacuum pump comprises: a stator; a rotor that rotates with respect to the stator; a pump casing in which the stator and the rotor are contained, and a suction port and a through-hole for exhaust are provided; a first exhaust duct fixed to an outer circumference of the pump casing so as to communicate with the through-hole for exhaust; and a second exhaust duct that is inserted into at least the through-hole for exhaust with a gap interposed, an exhaust gas passing inside the second exhaust duct.
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