Invention Grant
- Patent Title: Measurement equipment
-
Application No.: US15862476Application Date: 2018-01-04
-
Publication No.: US10222209B2Publication Date: 2019-03-05
- Inventor: Seungbae Park , Yu-Ho Hsu , Chin-Li Kao , Tai-Yuan Huang
- Applicant: Advanced Semiconductor Engineering, Inc.
- Applicant Address: TW Kaohsiung
- Assignee: ADVANCED SEMICONDUCTOR ENGINEERING, INC.
- Current Assignee: ADVANCED SEMICONDUCTOR ENGINEERING, INC.
- Current Assignee Address: TW Kaohsiung
- Agency: Foley & Lardner LLP
- Main IPC: G01C11/02
- IPC: G01C11/02 ; G01C11/04 ; G01B11/245

Abstract:
The measurement equipment includes a rack, a first image capturing device, a second image capturing device, a third image capturing device and a fourth image capturing device. Wherein, the first image capturing device and the second image capturing device capture an entire image of a to-be-measured object, the third image capturing device and the fourth image capturing device capture a plurality of local images of a plurality of local areas of the to-be-measured object, and the entire image and the local images and are simultaneously captured.
Public/Granted literature
- US20180128612A1 MEASUREMENT EQUIPMENT Public/Granted day:2018-05-10
Information query