Invention Grant
- Patent Title: Force detection apparatus having high sensor sensitivity
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Application No.: US15128453Application Date: 2015-03-24
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Publication No.: US10222281B2Publication Date: 2019-03-05
- Inventor: Kentaro Mizuno , Rie Taguchi , Shoji Hashimoto , Yoshie Ohira , Takashi Katsumata , Kouhei Yamaguchi
- Applicant: DENSO CORPORATION
- Applicant Address: JP Kariya
- Assignee: DENSO CORPORATION
- Current Assignee: DENSO CORPORATION
- Current Assignee Address: JP Kariya
- Agency: Posz Law Group, PLC
- Priority: JP2014-063198 20140326; JP2014-121824 20140612; JP2015-045682 20150309
- International Application: PCT/JP2015/001670 WO 20150324
- International Announcement: WO2015/146154 WO 20151001
- Main IPC: G01L1/18
- IPC: G01L1/18 ; G01L9/00 ; G01L9/06

Abstract:
A force detection apparatus includes a substrate and a force transmission block. The substrate includes: a high-sensitive mesa gauge that is provided on a main surface, extends in a first direction to produce a relatively large change of an electric resistance in accordance with compressive stress, and includes a top surface; a low-sensitive mesa gauge that is provided on the main surface, extends in a second direction to produce a relatively small change of an electric resistance, and includes a top surface; and a mesa lead that is provided on the main surface, extends in a third direction, and includes a top surface. The force transmission block contacts the top surface of the high-sensitive mesa gauge and the top surface of the low-sensitive mesa gauge, and is non-contact with at least a part of the top surface of the mesa lead.
Public/Granted literature
- US20170102274A1 FORCE DETECTION APPARATUS Public/Granted day:2017-04-13
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