Invention Grant
- Patent Title: Micro drive device and micro device using same
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Application No.: US15280557Application Date: 2016-09-29
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Publication No.: US10222608B2Publication Date: 2019-03-05
- Inventor: Eiji Iwase , Chisa Iino
- Applicant: WASEDA UNIVERSITY
- Applicant Address: JP Tokyo
- Assignee: WASEDA UNIVERSITY
- Current Assignee: WASEDA UNIVERSITY
- Current Assignee Address: JP Tokyo
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: JP2014-074963 20140331
- Main IPC: G02B26/08
- IPC: G02B26/08 ; G02B26/10 ; B81B3/00

Abstract:
Provided is a micro drive unit, which is capable of performing multi-axis drive, the micro drive unit including: a movable object; and at least one pair of beams configured to pivotally support the movable object and formed only in one direction, the movable object being configured to rotate or translate in an x-axis direction, a y-axis direction, and a z-axis direction when the at least one pair of beams is twisted or bent at one or a plurality of resonant frequencies of the at least one pair of beams, thereby being capable of simultaneously avoiding upsizing and complication of the structure. And by incorporating the micro drive unit, a micro device capable of achieving multi-axis drive can be manufactured.
Public/Granted literature
- US20170017074A1 MICRO DRIVE DEVICE AND MICRO DEVICE USING SAME Public/Granted day:2017-01-19
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