The present invention provides a conveyance apparatus which conveys a substrate to a stage, the apparatus comprising a holding unit configured to hold and rotate the substrate, a detection unit configured to detect a height of the substrate held by the holding unit, a conveyance unit configured to convey the substrate from the holding unit to the stage, and a control unit configured to control, based on a detection result of the detection unit obtained while the holding unit rotates the substrate, conveyance of the substrate by the conveyance unit.