Invention Grant
- Patent Title: Measurement apparatus for measuring shape of object, system and method for producing article
-
Application No.: US15202966Application Date: 2016-07-06
-
Publication No.: US10223575B2Publication Date: 2019-03-05
- Inventor: Tsuyoshi Kitamura , Akihiro Hatada
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc. IP Division
- Priority: JP2015-138157 20150709
- Main IPC: G06K9/00
- IPC: G06K9/00 ; G01B11/25 ; G06K9/46 ; B25J9/16

Abstract:
A measurement apparatus includes an optical combining unit configured to optically combine light from a first light source and light from a second light source, a forming unit configured to form pattern light using light from the first light source, a projection optical system configured to project the optically combined light onto an object, an imaging unit configured to image the object on which the pattern light is projected to capture a first image and to image the object illuminated with light from the second light source via the projection optical system to capture a second image, and a processing unit configured to correct the first image using the second image and to obtain information on a shape of the object based on the corrected first image.
Public/Granted literature
- US20170008169A1 MEASUREMENT APPARATUS FOR MEASURING SHAPE OF OBJECT, SYSTEM AND METHOD FOR PRODUCING ARTICLE Public/Granted day:2017-01-12
Information query