Invention Grant
- Patent Title: System and method for control of high efficiency generator source impedance
-
Application No.: US15664646Application Date: 2017-07-31
-
Publication No.: US10224184B2Publication Date: 2019-03-05
- Inventor: Gideon Van Zyl
- Applicant: Advanced Energy Industries, Inc.
- Applicant Address: SG Singapore
- Assignee: AES Global Holdings, PTE. LTD
- Current Assignee: AES Global Holdings, PTE. LTD
- Current Assignee Address: SG Singapore
- Agency: Neugeboren O'Dowd PC
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
Systems and methods for adjusting the source impedance of a generator are disclosed. An exemplary method includes generating a first signal and applying the first signal to a first input of a combiner, generating a second signal and applying the second signal to a second input of said combiner, and combining the first and second signals with the combiner at an output of the combiner to produce power that is delivered to the plasma load. A controllable variable impedance is provided to an isolation port of the combiner, and the controllable variable impedance is adjusted to vary the source impedance of the generator.
Public/Granted literature
- US20170330731A1 SYSTEM AND METHOD FOR CONTROL OF HIGH EFFICIENCY GENERATOR SOURCE IMPEDANCE Public/Granted day:2017-11-16
Information query