Invention Grant
- Patent Title: C-plane GaN substrate
-
Application No.: US15675230Application Date: 2017-08-11
-
Publication No.: US10224201B2Publication Date: 2019-03-05
- Inventor: Kenji Iso , Yuuki Enatsu , Hiromitsu Kimura
- Applicant: MITSUBISHI CHEMICAL CORPORATION
- Applicant Address: JP Tokyo
- Assignee: MITSUBISHI CHEMICAL CORPORATION
- Current Assignee: MITSUBISHI CHEMICAL CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Leason Ellis LLP
- Priority: JP2015-032949 20150223
- Main IPC: H01L21/20
- IPC: H01L21/20 ; H01L21/02 ; C30B25/04 ; C30B25/18 ; C30B29/40

Abstract:
Provides is a C-plane GaN substrate which, although formed from a GaN crystal grown so that surface pits are generated, is free from any inversion domain, and moreover, has a low spiral dislocation density in a gallium polar surface. Provides is a C-plane GaN substrate wherein: the substrate comprises a plurality of facet growth areas each having a closed ring outline-shape on a gallium polar surface; the spiral dislocation density is less than 1×106 cm−2 anywhere on the gallium polar surface; and the substrate is free from any inversion domain. The C-plane GaN substrate may comprise a high dislocation density part having a dislocation density of more than 1×107 cm−2 and a low dislocation density part having a dislocation density of less than 1×106 cm−2 on the gallium polar surface.
Public/Granted literature
- US20170338112A1 C-PLANE GaN SUBSTRATE Public/Granted day:2017-11-23
Information query
IPC分类: