Invention Grant
- Patent Title: Handler bonding and debonding for semiconductor dies
-
Application No.: US14983674Application Date: 2015-12-30
-
Publication No.: US10224219B2Publication Date: 2019-03-05
- Inventor: Paul S. Andry , Bing Dang , Jeffrey Donald Gelorme , Li-Wen Hung , John U. Knickerbocker , Cornelia Tsang Yang
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Fleit Gibbons Gutman Bongini Bianco PL
- Agent Thomas S. Grzesik
- Main IPC: H01L21/56
- IPC: H01L21/56 ; H01L21/67 ; H01L21/683 ; H01L23/00

Abstract:
Various embodiments process semiconductor devices. In one embodiment, a release layer is applied to a handler. The at least one singulated semiconductor device is bonded to the handler. The at least one singulated semiconductor device is packaged while it is bonded to the handler. The release layer is ablated by irradiating the release layer through the handler with a laser. The at least one singulated semiconductor device is removed from the transparent handler after the release layer has been ablated.
Public/Granted literature
- US20170194185A1 HANDLER BONDING AND DEBONDING FOR SEMICONDUCTOR DIES Public/Granted day:2017-07-06
Information query
IPC分类: