Invention Grant
- Patent Title: Semiconductor device with different fin pitches
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Application No.: US15697539Application Date: 2017-09-07
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Publication No.: US10224327B2Publication Date: 2019-03-05
- Inventor: Bruce B. Doris , Terence B. Hook
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Main IPC: H01L27/088
- IPC: H01L27/088 ; H01L21/8234 ; H01L29/161 ; H01L29/66 ; H01L21/027 ; H01L21/308 ; H01L21/311 ; H01L27/02

Abstract:
A method for forming a semiconductor device includes forming a first fin and a second fin on a substrate, the first fin arranged in parallel with the second fin, the first fin arranged a first distance from the second fin, the first fin and the second fin extending from a first source/drain region through a channel region and into a second source/drain region on the substrate. The method further includes forming a third fin on the substrate, the third fin arranged in parallel with the first fin and between the first fin and the second fin, the third fin arranged a second distance from the first fin, the second distance is less than the first distance, the third fin having two distal ends arranged in the first source/drain region. A gate stack is formed over the first fin and the second fin.
Public/Granted literature
- US20170365601A1 SEMICONDUCTOR DEVICE WITH DIFFERENT FIN PITCHES Public/Granted day:2017-12-21
Information query
IPC分类: