Invention Grant
- Patent Title: Self-aligned junction structures
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Application No.: US15407960Application Date: 2017-01-17
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Publication No.: US10224330B2Publication Date: 2019-03-05
- Inventor: Jianwei Peng , Xusheng Wu
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts Mlotkowski Safran Cole & Calderon P.C.
- Agent Francois Pagette; Andrew M. Calderon
- Main IPC: H01L27/00
- IPC: H01L27/00 ; H01L27/092 ; H01L29/161 ; H01L21/8238 ; H01L29/66 ; H01L21/308

Abstract:
The present disclosure relates to semiconductor structures and, more particularly, to self-aligned junction structures and methods of manufacture. The structure includes: a plurality of epitaxial grown fin structures for first type devices; and a plurality epitaxial grown fin structures for second type devices having sidewall liners.
Public/Granted literature
- US20180204840A1 SELF-ALIGNED JUNCTION STRUCTURES Public/Granted day:2018-07-19
Information query
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