Invention Grant
- Patent Title: Method for fabricating superconducting devices using a focused ion beam
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Application No.: US15317101Application Date: 2015-06-11
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Publication No.: US10224475B2Publication Date: 2019-03-05
- Inventor: Shane A. Cybart , Ethan Y. Cho , Robert C. Dynes , Travis J. Wong
- Applicant: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
- Applicant Address: US CA Oakland
- Assignee: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
- Current Assignee: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
- Current Assignee Address: US CA Oakland
- Agency: Musick Davison LLP
- Agent Eleanor Musick
- International Application: PCT/US2015/035426 WO 20150611
- International Announcement: WO2016/003626 WO 20160107
- Main IPC: G01R33/035
- IPC: G01R33/035 ; H01L39/24 ; H01L27/18
Abstract:
Nano-scale junctions, wires, and junction arrays are created by using a focused high-energy ion beam to direct-write insulating or poorly conducting barriers into thin films of materials that are sensitive to disorder, including superconductors, ferromagnetic materials and semiconductors.
Public/Granted literature
- US20170133577A1 METHOD FOR FABRICATING SUPERCONDUCTING DEVICES USING A FOCUSED ION BEAM Public/Granted day:2017-05-11
Information query
