Invention Grant
- Patent Title: Low-temperature co-firing of multilayer textured piezoelectric ceramics with inner electrodes
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Application No.: US14376319Application Date: 2013-02-01
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Publication No.: US10224476B2Publication Date: 2019-03-05
- Inventor: Yongke Yan , Shashank Priya
- Applicant: VIRGINIA TECH INTELLECTUAL PROPERTIES, INC.
- Applicant Address: US VA Blacksburg
- Assignee: VIRGINIA TECH INTELLECTUAL PROPERTIES, INC.
- Current Assignee: VIRGINIA TECH INTELLECTUAL PROPERTIES, INC.
- Current Assignee Address: US VA Blacksburg
- Agency: New River Valley IP Law, PC
- Agent Michele L. Mayberry
- International Application: PCT/US2013/024303 WO 20130201
- International Announcement: WO2013/116616 WO 20130808
- Main IPC: H01L41/20
- IPC: H01L41/20 ; C04B35/64 ; H01L41/43 ; H01L41/187 ; H01L41/273 ; H01L41/047 ; H01L41/083 ; C04B35/26 ; C04B35/493 ; C04B35/499 ; H01L41/16

Abstract:
Textured PMN-PZT fabricated by templated grain growth (TGG) method has a piezoelectric coefficient (d) of 3 to 5 times that of its random counterpart. By combining this TGG method with low-temperature co-firing ceramics (LTCC) techniques, co-fired multilayer textured piezoelectric ceramic materials with inner electrodes were produced at a temperature as low as 925° C., which silver could be used. Trilayer PMN-PZT ceramics prepared by this method show a strain increase of 2.5 times, a driving voltage decrease of 3 times, and an equivalent piezoelectric coefficient (d*) improvement of 10 to 15 times that of conventional random ceramic counterparts. Further, a co-fired magnetostrictive/piezoelectric/magnetostrictive laminate structure with silver inner electrode was also synthesized. The integration of textured piezoelectric microstructure with the cost-effective low-temperature co-fired layered structure achieves strong magnetoelectric coupling. These new materials have promising applications including as actuators, ultrasonic transducers, and use in energy harvesters.
Public/Granted literature
- US20140375174A1 LOW-TEMPERATURE CO-FIRING OF MULTILAYER TEXTURED PIEZOELECTRIC CERAMICS WITH INNER ELECTRODES Public/Granted day:2014-12-25
Information query
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