Invention Grant
- Patent Title: Laser apparatus, EUV light generation system, and method of controlling laser apparatus
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Application No.: US15356763Application Date: 2016-11-21
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Publication No.: US10224686B2Publication Date: 2019-03-05
- Inventor: Yasufumi Kawasuji , Naoya Takaoka , Toshio Yokozuka
- Applicant: GIGAPHOTON INC.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Priority: WOPCT/JP2014/067509 20140701
- Main IPC: H01S3/102
- IPC: H01S3/102 ; H01S3/13 ; H01S3/10 ; H01L21/027 ; H01S3/097 ; H01L21/67 ; H01S3/09 ; H01S3/104 ; H01S3/23 ; H05G2/00 ; H01S3/134 ; H01S3/223 ; H01S5/34 ; H01S5/40

Abstract:
A laser apparatus may include: an optical amplifier configured to amplify a laser beam outputted from a master oscillator; an optical-amplifier power supply configured to supply an alternating current for optical amplification to the optical amplifier; and a laser controller. The optical-amplifier power supply may include: an alternating current generation circuit including an inverter circuit configured to change output amplitude in accordance with a duty cycle, the alternating current generation circuit being configured to generate the alternating current from an output of the inverter circuit; and a power supply control circuit configured to hold control information defining correspondence relations between command values from the laser controller and duty cycles of the inverter circuit, determine a duty cycle corresponding to a command value received from the laser controller based on the control information, and provide the determined duty cycle to the inverter circuit.
Public/Granted literature
- US20170070024A1 LASER APPARATUS, EUV LIGHT GENERATION SYSTEM, AND METHOD OF CONTROLLING LASER APPARATUS Public/Granted day:2017-03-09
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