Invention Grant
- Patent Title: Extreme ultraviolet light generating apparatus
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Application No.: US16055274Application Date: 2018-08-06
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Publication No.: US10225918B2Publication Date: 2019-03-05
- Inventor: Yuichi Nishimura , Takayuki Yabu
- Applicant: GIGAPHOTON INC.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Priority: WOPCT/JP2016/057196 20160308
- Main IPC: G01J1/42
- IPC: G01J1/42 ; G03F7/20 ; H05G2/00

Abstract:
An extreme ultraviolet light generating apparatus moves a generation position of extreme ultraviolet light based on an instruction from an external device and includes a chamber in which a target fed therein is irradiated with laser light so that the extreme ultraviolet light is generated from the target; a target feeder configured to output and feed the target into the chamber; a condensing mirror configured to condense the laser light on the target fed into the chamber; a stage configured to regulate a position of the target feeder; a manipulator configured to regulate a position of the condensing mirror; and a control unit configured to be able to control at least one of the stage, the manipulator, and a radiation timing of the laser light to the target, in a feedforward method, when the generation position is moved during generation of the extreme ultraviolet light.
Public/Granted literature
- US20180352641A1 EXTREME ULTRAVIOLET LIGHT GENERATING APPARATUS Public/Granted day:2018-12-06
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