Invention Grant
- Patent Title: Substrate for sensor, physical quantity detection sensor, acceleration sensor, electronic apparatus, and moving object
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Application No.: US15381574Application Date: 2016-12-16
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Publication No.: US10228385B2Publication Date: 2019-03-12
- Inventor: Takahiro Kameta
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2015-256059 20151228
- Main IPC: G01P15/097
- IPC: G01P15/097 ; G01P15/09 ; G01P15/08
Abstract:
A substrate for a sensor includes: a base section; a movable section connected to the base section; an arm portion as a support portion extending along the movable section from the base section; a first gap portion having a protrusion portion in which one of the movable section and the arm portion protrudes toward the other of the movable section and the arm portion, and having a predetermined gap between the protrusion portion on one side and the other of the movable section and the support portion; and a second gap portion which is located further toward the base section side than the first gap portion has a gap wider than the predetermined gap, in which in the first gap portion, one of the movable section and the arm portion has a ridge portion on the side facing the first gap portion.
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Information query
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