Invention Grant
- Patent Title: Two-dimensional material-based accelerometer
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Application No.: US14546877Application Date: 2014-11-18
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Publication No.: US10228387B2Publication Date: 2019-03-12
- Inventor: Adam Hurst , Sunwoo Lee , James Hone
- Applicant: Kulite Semiconductor Products, Inc.
- Applicant Address: US NJ Leonia
- Assignee: Kulite Semiconductor Products, Inc.
- Current Assignee: Kulite Semiconductor Products, Inc.
- Current Assignee Address: US NJ Leonia
- Agency: Troutman Sanders LLP
- Agent James E. Schutz; Christopher C. Close, Jr.
- Main IPC: G01P15/18
- IPC: G01P15/18 ; G01P15/12 ; G01P15/125

Abstract:
This disclosure provides systems and methods for a two-dimensional material-based accelerometer. In one embodiment, an accelerometer comprises a substrate; a membrane suspended over an opening in the substrate to form a suspended membrane, wherein the membrane is composed of a two-dimensional material; a mass structure coupled to the suspended membrane; and wherein the mass structure distorts the suspended membrane about a first axis in response to an applied acceleration providing a first change in a conductance of the suspended membrane so that the applied acceleration along the first axis can be detected.
Public/Granted literature
- US20150362521A1 TWO-DIMENSIONAL MATERIAL-BASED ACCELEROMETER Public/Granted day:2015-12-17
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