Invention Grant
- Patent Title: Method and apparatus for infrared scattering scanning near-field optical microscopy with background suppression
-
Application No.: US14957480Application Date: 2015-12-02
-
Publication No.: US10228389B2Publication Date: 2019-03-12
- Inventor: Honghua Yang , Craig Prater
- Applicant: Bruker Nano, Inc.
- Applicant Address: US CA Santa Barbara
- Assignee: Bruker Nano, Inc.
- Current Assignee: Bruker Nano, Inc.
- Current Assignee Address: US CA Santa Barbara
- Agency: Boyle Fredrickson S.C.
- Main IPC: G01Q30/02
- IPC: G01Q30/02 ; G01Q20/02 ; G01Q60/06

Abstract:
System and method for measuring an optical property of a sub micrometer region of a sample including interacting a probe tip of a probe microscope with a region of the sample, illuminating the sample with a beam of light from a radiation source such that light is scattered from the probe-sample interaction region, interfering a reference beam with the scattered light wherein the reference beam has an adjustable optical phase, measuring with a detector at least a portion of the light scattered from probe-sample and background regions at a substantially constant reference phase, and constructing a signal indicative of the optical property of the sample wherein contributions from background scattered light are substantially suppressed.
Public/Granted literature
Information query