Invention Grant
- Patent Title: Solid-state impedance matching systems including a hybrid tuning network with a switchable coarse tuning network and a varactor fine tuning network
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Application No.: US15162960Application Date: 2016-05-24
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Publication No.: US10229816B2Publication Date: 2019-03-12
- Inventor: David J. Coumou , Dennis M Brown , Aaron T. Radomski , Mariusz Oldziej , Yogendra K. Chawla , Daniel J. Lincoln
- Applicant: MKS Instruments, Inc.
- Applicant Address: US MA Andover
- Assignee: MKS Instruments, Inc.
- Current Assignee: MKS Instruments, Inc.
- Current Assignee Address: US MA Andover
- Agency: Harness, Dickey & Pierce, P.L.C.
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H03J7/08 ; H03H11/28 ; H05K7/20 ; H03F1/02 ; H03F1/32 ; H03F1/56 ; H03F3/189 ; H03F3/217

Abstract:
An eVC including coarse and fine tuning networks. The coarse tuning network includes a circuit: receiving a RF input signal from a RF generator; outputting a RF output signal to a reference terminal or load; and receiving a DC bias voltage. The circuit is switched between first and second states. A capacitance of the circuit is based on the DC bias voltage while in the first state and is not based on the DC bias voltage while in the second state. The fine tuning network is connected in parallel with the coarse tuning network and includes a varactor. The varactor includes: a first diode receiving the RF input signal; and a second diode connected in a back-to-back configuration with the first diode and outputting a RF output signal to the reference terminal or load. A capacitance of the varactor is based on a second received DC bias voltage.
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