Invention Grant
- Patent Title: Method for producing pillar-shaped semiconductor device
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Application No.: US15712637Application Date: 2017-09-22
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Publication No.: US10229916B2Publication Date: 2019-03-12
- Inventor: Fujio Masuoka , Nozomu Harada
- Applicant: Unisantis Electronics Singapore Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: UNISANTIS ELECTRONICS SINGAPORE PTE. LTD.
- Current Assignee: UNISANTIS ELECTRONICS SINGAPORE PTE. LTD.
- Current Assignee Address: SG Singapore
- Agency: Brinks Gilson & Lione
- Priority: WOPCT/JP2015/078776 20151009
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L27/11 ; H01L27/12 ; H01L29/66 ; H01L29/423

Abstract:
A method for producing a pillar-shaped semiconductor device includes forming, above a NiSi layer serving as a lower wiring conductor layer and connecting to an N+ layer of an SGT formed within a Si pillar, a first conductor W layer that extends through a NiSi layer serving as an upper wiring conductor layer and connecting to a gate TiN layer and that extends through a NiSi layer serving as an intermediate wiring conductor layer and connecting to an N+ layer; forming an insulating SiO2 layer between the NiSi layer and the W layer; and forming a second conductor W layer so as to surround the W layer and have its bottom at the upper surface layer of the NiSi layer, to achieve connection between the NiSi layer and the NiSi layer.
Public/Granted literature
- US20180012896A1 METHOD FOR PRODUCING PILLAR-SHAPED SEMICONDUCTOR DEVICE Public/Granted day:2018-01-11
Information query
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