Invention Grant
- Patent Title: Semiconductor light receiving device, optical receiver module and manufacturing method thereof
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Application No.: US15042655Application Date: 2016-02-12
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Publication No.: US10230008B2Publication Date: 2019-03-12
- Inventor: Masahiro Ebisu , Hiroshi Hamada , Yasushi Sakuma , Shigenori Hayakawa
- Applicant: Oclaro Japan, Inc.
- Applicant Address: JP Kanagawa
- Assignee: Oclaro Japan, Inc.
- Current Assignee: Oclaro Japan, Inc.
- Current Assignee Address: JP Kanagawa
- Agency: Mattingly & Malur, PC
- Priority: JP2015-029677 20150218
- Main IPC: H01L31/02
- IPC: H01L31/02 ; H01L31/18 ; H01L31/0203 ; H01L31/0352 ; H01L31/0232 ; H01L31/103

Abstract:
Provided are a semiconductor light receiving device, an optical receiver module, and a manufacturing method thereof in which characteristics of the device are improved when the device has a structure in which a mesa structure including layers formed of a common material is buried by a buried layer. The semiconductor light receiving device includes the mesa structure including the layers formed of a commonmaterial, the layers including an absorbing layer, the mesa structure being buried by the buried layer formed so as to surround side surfaces of the mesa structure. The mesa structure has a cross section having a forwardly tapered portion and a reversely tapered portion.
Public/Granted literature
- US20160240698A1 SEMICONDUCTOR LIGHT RECEIVING DEVICE, OPTICAL RECEIVER MODULE AND MANUFACTURING METHOD THEREOF Public/Granted day:2016-08-18
Information query
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