Invention Grant
- Patent Title: Plasma processing apparatus and plasma processing method
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Application No.: US14799650Application Date: 2015-07-15
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Publication No.: US10233535B2Publication Date: 2019-03-19
- Inventor: Yoshihide Kihara , Masanobu Honda , Toru Hisamatsu
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: IPUSA, PLLC
- Priority: JP2014-153894 20140729
- Main IPC: C23C14/34
- IPC: C23C14/34 ; C23C14/00 ; C23C16/505 ; C23C16/44 ; C23C16/448 ; H01J37/34 ; C23C14/06 ; C23C16/30 ; C23C16/509 ; H01J37/32

Abstract:
A plasma processing apparatus includes a first electrode, a second electrode disposed to face the first electrode, a chamber, a first high-frequency power supply, a direct-current power supply, and a gas supply source. The plasma processing apparatus generates first plasma to form a film of a reaction product on the second electrode by causing the first high-frequency power supply to supply first high-frequency power to the second electrode and causing the gas supply source to supply a first gas into the chamber; and generates second plasma to sputter the film of the reaction product by causing the first high-frequency power supply to supply the first high-frequency power to the second electrode, causing the direct-current power supply to supply direct-current power to the second electrode, and causing the gas supply source to supply a second gas into the chamber.
Public/Granted literature
- US20160032445A1 PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD Public/Granted day:2016-02-04
Information query
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