Invention Grant
- Patent Title: Vacuum pump control device
-
Application No.: US15479433Application Date: 2017-04-05
-
Publication No.: US10233943B2Publication Date: 2019-03-19
- Inventor: Nobuhiko Moriyama
- Applicant: Shimadzu Corporation
- Applicant Address: JP Kyoto
- Assignee: Shimadzu Corporation
- Current Assignee: Shimadzu Corporation
- Current Assignee Address: JP Kyoto
- Agency: Renner Otto Boisselle & Sklar, LLP
- Main IPC: F04D29/58
- IPC: F04D29/58 ; F04D25/06 ; F04D29/058

Abstract:
A vacuum pump control device comprises: a pump controller configured to control a vacuum pump; a cooling device configured to cool the pump controller; a housing configured to house the pump controller; a temperature sensor configured to detect, in the housing, a temperature at one of a first position or a second position having a higher temperature than that at the first position; a humidity sensor configured to detect a humidity at the second position in the housing; a temperature estimator configured to estimate a temperature at the other one of the first position or the second position based on the temperature detected by the temperature sensor; and a cooling controller configured to control execution and stop of cooling operation by the cooling device based on the temperature estimated by the temperature estimator, the temperature detected by the temperature sensor, and the humidity detected by the humidity sensor.
Public/Granted literature
- US20180291926A1 VACUUM PUMP CONTROL DEVICE Public/Granted day:2018-10-11
Information query