Invention Grant
- Patent Title: Fast and continuous eddy-current metrology of a conductive film
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Application No.: US13998741Application Date: 2013-10-29
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Publication No.: US10234261B2Publication Date: 2019-03-19
- Inventor: Edward W. Budiarto , Dmitry A. Dzilno , Todd J. Egan , Jeffrey C. Hudgens , Nir Merry
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Fish & Richardson P.C.
- Main IPC: C25D7/12
- IPC: C25D7/12 ; G01B7/06 ; C25D17/12 ; C25D21/12 ; G01N27/20 ; C25D17/00
Abstract:
A measurement tool includes a rotation stage supporting an workpiece support, a thickness sensor overlying a workpiece support surface; a translation actuator coupled to the thickness sensor for translation of the thickness sensor relative to the workpiece support surface; and a computer coupled to control the rotation actuator and the translation actuator, and coupled to receive an output of the thickness sensor.
Public/Granted literature
- US20140367266A1 FAST AND CONTINUOUS EDDY-CURRENT METROLOGY OF A CONDUCTIVE FILM Public/Granted day:2014-12-18
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