- Patent Title: Scanner based optical proximity correction system and method of use
-
Application No.: US15691388Application Date: 2017-08-30
-
Publication No.: US10234756B2Publication Date: 2019-03-19
- Inventor: Jacek Tyminski , Raluca Popescu , Tomoyuki Matsuyama
- Applicant: NIKON CORPORATION , NIKON PRECISION INC.
- Applicant Address: JP Tokyo US CA Belmont
- Assignee: NIKON CORPORATION,NIKON PRECISION INC.
- Current Assignee: NIKON CORPORATION,NIKON PRECISION INC.
- Current Assignee Address: JP Tokyo US CA Belmont
- Agency: Roberts Mlotkowski Safran Cole & Calderon, P.C.
- Agent Andrew M. Calderon
- Main IPC: G06F17/50
- IPC: G06F17/50 ; G03F1/36 ; G03F1/00 ; G03F1/68
Abstract:
A modeling technique is provided. The modeling technique includes inputting tool parameters into a model and inputting basic model parameters into the model. The technique further includes generating a simulated, corrected reticle design using the tool parameters and the basic model parameters. An image of test patterns is compared against the simulated, corrected reticle design. A determination is made as to whether δ1
Public/Granted literature
- US20170363951A1 SCANNER BASED OPTICAL PROXIMITY CORRECTION SYSTEM AND METHOD OF USE Public/Granted day:2017-12-21
Information query
