Invention Grant
- Patent Title: Measuring apparatus, measuring method, and program
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Application No.: US15144550Application Date: 2016-05-02
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Publication No.: US10235743B2Publication Date: 2019-03-19
- Inventor: Takayuki Uozumi , Shigeki Kato , Takashi Seki , Yusuke Kasai
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon USA Inc., IP Division
- Priority: JP2015-096830 20150511
- Main IPC: G01N21/00
- IPC: G01N21/00 ; G06T7/00 ; G06T5/20 ; G01N21/84 ; G01N21/55 ; G06T7/32 ; G06T7/37 ; G01N21/57

Abstract:
A measuring apparatus includes an optical system configured to project light onto a sample and to receive light via the sample, an imaging device configured to take an image of a light source via the optical system, and a processor configured to obtain an optical characteristic of the sample based on an output of the imaging device. The processor is configured to determine a coefficient of a Wiener filter based on one of the image and a Fourier transform thereof and corresponding one of the light source (an aperture in an aperture unit) and a Fourier transform thereof, and obtain the optical characteristic based on the Wiener filter of which the coefficient has been determined, a Fourier transform of the image, and a Fourier transform of the light source.
Public/Granted literature
- US20160335772A1 MEASURING APPARATUS, MEASURING METHOD, AND PROGRAM Public/Granted day:2016-11-17
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