Electrostatic nozzle, discharge apparatus, and method for manufacturing semiconductor module
Abstract:
An electrostatic nozzle includes a first pipe, a second pipe, and a third pipe. The first pipe is configured of a conductor. Voltage is applied on the first pipe by a power source. The second pipe is configured of an insulator and connected to the first pipe. The third pipe is configured of a metal, connected to the second pipe, insulated from the first pipe by the second pipe, and thinner than the second pipe. Liquid which has flown through the first pipe, the second pipe, and the third pipe is discharged from a distal end of the third pipe.
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