Invention Grant
- Patent Title: Electrostatic nozzle, discharge apparatus, and method for manufacturing semiconductor module
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Application No.: US15005236Application Date: 2016-01-25
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Publication No.: US10236188B2Publication Date: 2019-03-19
- Inventor: Atsuko Yamanaka
- Applicant: TOYOTA JIDOSHA KABUSHIKI KAISHA
- Applicant Address: JP Toyota
- Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHA
- Current Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHA
- Current Assignee Address: JP Toyota
- Agency: Oliff PLC
- Priority: JP2015-062894 20150325
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L21/56 ; H01L23/433 ; B05B5/043 ; H01L23/31

Abstract:
An electrostatic nozzle includes a first pipe, a second pipe, and a third pipe. The first pipe is configured of a conductor. Voltage is applied on the first pipe by a power source. The second pipe is configured of an insulator and connected to the first pipe. The third pipe is configured of a metal, connected to the second pipe, insulated from the first pipe by the second pipe, and thinner than the second pipe. Liquid which has flown through the first pipe, the second pipe, and the third pipe is discharged from a distal end of the third pipe.
Public/Granted literature
- US20160279650A1 ELECTROSTATIC NOZZLE, DISCHARGE APPARATUS, AND METHOD FOR MANUFACTURING SEMICONDUCTOR MODULE Public/Granted day:2016-09-29
Information query
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