Invention Grant
- Patent Title: Cobalt top layer advanced metallization for interconnects
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Application No.: US15813522Application Date: 2017-11-15
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Publication No.: US10236257B2Publication Date: 2019-03-19
- Inventor: Daniel C Edelstein , Chih-Chao Yang
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Jeffrey S LaBaw; Steven J Meyers
- Main IPC: H01L23/532
- IPC: H01L23/532 ; H01L23/522 ; H01L21/768 ; H01L21/285 ; H01L23/528

Abstract:
A method for constructing an advance conductor structure is described. A pattern is provided in a dielectric layer in which a set of features are patterned for a set of metal conductor structures. An adhesion promoting layer is created disposed over the patterned dielectric. A metal layer is deposited to fill a first portion of the set of features disposed the adhesion promoting layer. A ruthenium layer is deposited disposed over the metal layer. Using a physical vapor deposition process, a cobalt layer is deposited disposed over the ruthenium layer. A thermal anneal reflows the cobalt layer to fill a second portion of the set of features.
Public/Granted literature
- US20180082956A1 COBALT TOP LAYER ADVANCED METALLIZATION FOR INTERCONNECTS Public/Granted day:2018-03-22
Information query
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