Invention Grant
- Patent Title: Packaging structure including interconnecs and packaging method thereof
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Application No.: US15614056Application Date: 2017-06-05
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Publication No.: US10236273B2Publication Date: 2019-03-19
- Inventor: Chong Wang , Hai Fang Zhang , Xuan Jie Liu
- Applicant: Semiconductor Manufacturing International (Shanghai) Corporation , Semiconductor Manufacturing International (Beijing) Corporation
- Applicant Address: CN Shanghai CN Beijing
- Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION,SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORPORATION
- Current Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION,SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORPORATION
- Current Assignee Address: CN Shanghai CN Beijing
- Agency: Anova Law Group, PLLC
- Priority: CN201610407331 20160612
- Main IPC: H01L25/04
- IPC: H01L25/04 ; H01L23/00 ; H01L23/053 ; H01L23/31 ; H01L23/12 ; H01L51/00 ; H01L23/64 ; H01L21/768 ; H01L23/48

Abstract:
A packaging structure and a packaging method are provided. The packaging structure includes a carrier semiconductor structure including a carrier substrate, a carrier dielectric layer, and a carrier top conductive layer inside the carrier dielectric layer and having a top exposed by the carrier dielectric layer. The packaging structure also includes a top semiconductor structure including a top substrate, a first dielectric layer, a zeroth conductive layer, and a second dielectric layer, wherein a position of the zeroth conductive layer corresponds to a position of the carrier top conductive layer. Further, the packaging structure includes a conductive plug formed on one side of the zeroth conductive layer, and penetrating through the top substrate, the first dielectric layer, and the second dielectric layer, wherein the conductive plug is electrically connected to each of the zeroth conductive layer and the carrier top conductive layer.
Public/Granted literature
- US20170271306A1 PACKAGING STRUCTURE AND PACKAGING METHOD THEREOF Public/Granted day:2017-09-21
Information query
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