Invention Grant
- Patent Title: Complementary FETs with wrap around contacts and methods of forming same
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Application No.: US16156082Application Date: 2018-10-10
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Publication No.: US10236292B1Publication Date: 2019-03-19
- Inventor: Julien Frougier , Ruilong Xie , Puneet H. Suvarna , Hiroaki Niimi , Steven J. Bentley , Ali Razavieh
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Hoffman Warnick LLC
- Agent Anthony Canale
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L29/66 ; H01L27/092 ; H01L21/8238 ; H01L21/285 ; H01L21/768 ; H01L29/45 ; H01L29/786

Abstract:
The present disclosure relates generally to wrap around contact formation in source/drain regions of a semiconductor device such as an integrated circuit (IC), and more particularly, to stacked IC structures containing complementary FETs (CFETs) having wrap around contacts and methods of forming the same. Disclosed is a stacked IC structure including a first FET on a substrate, a second FET vertically stacked above the first FET, a dielectric layer above the second FET, and a spacer layer between FETs, wherein each FET has an electrically isolated wrap-around contact formed therearound.
Information query
IPC分类: