Invention Grant
- Patent Title: On-pitch drain select level isolation structure for three-dimensional memory device and method of making the same
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Application No.: US15784549Application Date: 2017-10-16
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Publication No.: US10236300B2Publication Date: 2019-03-19
- Inventor: Yanli Zhang , Masanori Tsutsumi , Shinsuke Yada , Sayako Nagamine , Johann Alsmeier
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX Addison
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX Addison
- Agency: The Marbury Law Group PLLC
- Main IPC: H01L27/11524
- IPC: H01L27/11524 ; H01L27/11582 ; H01L27/1157 ; H01L27/11529 ; H01L27/11556 ; H01L27/11573

Abstract:
A three-dimensional memory structure includes an alternating stack of insulating layers and electrically conductive layers located over a substrate, an array of memory stack structures extending through the alternating stack, an array of drain select level assemblies overlying the alternating stack and having a same periodicity as the array of memory stack structures, drain select gate electrodes laterally surrounding respective rows of the drain select level assemblies, and a drain select level isolation strip located between a neighboring pair of drain select gate electrodes and including a pair of lengthwise sidewalls. Each of the pair of lengthwise sidewalls includes a laterally alternating sequence of planar sidewall portions and convex sidewall portions.
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