Invention Grant
- Patent Title: Fractal-edge thin film and method of manufacture
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Application No.: US15268190Application Date: 2016-09-16
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Publication No.: US10236320B2Publication Date: 2019-03-19
- Inventor: Oray Orkun Cellek
- Applicant: OmniVision Technologies, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: OmniVision Technologies, Inc.
- Current Assignee: OmniVision Technologies, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Lathrop Gage LLP
- Main IPC: B32B3/10
- IPC: B32B3/10 ; H01L27/146

Abstract:
A method of manufacturing a fractal-edge thin film includes determining an area shape to be covered by the fractal-edge thin film. The method also includes generating a thin-film perimeter based upon the area shape, the thin-film perimeter having a fractal dimension exceeding one. The method also includes determining a photomask perimeter such that a photomask with the photomask perimeter, when used in a photolithography process, yields a fractal-edge thin film with the thin-film perimeter. The method may also include photolithographically etching a thin-film, the thin film having a photoresist layer disposed thereon, the photoresist layer having been exposed through the photomask, wherein the etching results in the fractal-edge thin film.
Public/Granted literature
- US20170005133A1 Fractal-Edge Thin Film And Method Of Manufacture Public/Granted day:2017-01-05
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