Invention Grant
- Patent Title: SiC single crystal seed, SiC ingot, SiC single crystal seed production method, and SiC single crystal ingot production method
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Application No.: US15565439Application Date: 2016-04-20
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Publication No.: US10236338B2Publication Date: 2019-03-19
- Inventor: Yuuki Furuya , Tomohiro Shonai , Yasushi Urakami , Itaru Gunjishima
- Applicant: SHOWA DENKO K.K.
- Applicant Address: JP Tokyo
- Assignee: SHOWA DENKO K.K.
- Current Assignee: SHOWA DENKO K.K.
- Current Assignee Address: JP Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JP2015-086810 20150421
- International Application: PCT/JP2016/062511 WO 20160420
- International Announcement: WO2016/171168 WO 20161027
- Main IPC: C30B29/36
- IPC: C30B29/36 ; C30B33/00 ; H01L29/04 ; C30B23/02

Abstract:
A SiC single crystal seed of the present invention has a main surface with an offset angle of at least 2° but not more than 20° relative to the {0001} plane, and at least one sub-growth surface, wherein the sub-growth surface includes an initial facet formation surface that is on the offset upstream side of the main surface and has an inclination angle θ relative to the {0001} plane with an absolute value of less than 2° in any direction, and the initial facet formation surface has a screw dislocation starting point.
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