Invention Grant
- Patent Title: Method of producing an electronic device with a graphene device and semiconductor device formed on a common semiconductor substrate
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Application No.: US15664578Application Date: 2017-07-31
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Publication No.: US10236347B2Publication Date: 2019-03-19
- Inventor: Aftab Mustansir Hussain
- Applicant: KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Applicant Address: SA Thuwal
- Assignee: KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Current Assignee: KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Current Assignee Address: SA Thuwal
- Agency: Patent Portfolio Builders PLLC
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L29/16 ; H01L21/02 ; H01L29/08 ; H01L23/66 ; H01L29/786 ; H01L29/66 ; H01L27/088 ; H01L21/8258 ; H01L27/00 ; H01L29/00 ; H01Q1/36 ; H01Q1/38 ; H01L29/778 ; H01L27/092
Abstract:
A method for producing an electronic device involves forming a graphene precursor on a first portion of a common semiconductor substrate, forming a graphene layer on the graphene precursor, and forming a semiconductor device on a second portion of the common semiconductor substrate.
Public/Granted literature
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