Dual gate oxide thin-film transistor and manufacturing method for the same
Abstract:
A dual gate oxide thin-film transistor and manufacturing method for the same. The thin-film transistor comprises: a substrate; a bottom gate electrode formed on the substrate; a first gate insulation layer disposed on the bottom gate electrode; a semiconductor layer formed on the first gate insulation layer; a second gate insulation layer formed on the semiconductor layer; and a top gate electrode formed on the second gate insulation layer; wherein, the transistor further comprises a data line, the data line and the bottom gate electrode, or the data line and the top gate electrode are located at a same metal layer. Because the data line and the bottom gate (or the top gate) electrodes are located at a same metal layer, and through one photolithography for patterning to reduce the number of the mask, decrease the production cost. Besides, the stability and the response speed are increased.
Information query
Patent Agency Ranking
0/0