Invention Grant
- Patent Title: Dual gate oxide thin-film transistor and manufacturing method for the same
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Application No.: US15328189Application Date: 2016-08-16
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Publication No.: US10236388B2Publication Date: 2019-03-19
- Inventor: Yingtao Xie
- Applicant: Wuhan China Star Optoelectronics Technology Co., Ltd.
- Applicant Address: CN Wuhan, Hubei
- Assignee: Wuhan China Star Optoelectronics Technology Co., Ltd
- Current Assignee: Wuhan China Star Optoelectronics Technology Co., Ltd
- Current Assignee Address: CN Wuhan, Hubei
- Agent Andrew C. Cheng
- International Application: PCT/CN2016/095421 WO 20160816
- International Announcement: WO2017/215109 WO 20171221
- Main IPC: H01L27/14
- IPC: H01L27/14 ; H01L29/786 ; H01L27/12 ; H01L29/66 ; H01L21/02 ; H01L21/027 ; H01L21/4763 ; H01L29/24

Abstract:
A dual gate oxide thin-film transistor and manufacturing method for the same. The thin-film transistor comprises: a substrate; a bottom gate electrode formed on the substrate; a first gate insulation layer disposed on the bottom gate electrode; a semiconductor layer formed on the first gate insulation layer; a second gate insulation layer formed on the semiconductor layer; and a top gate electrode formed on the second gate insulation layer; wherein, the transistor further comprises a data line, the data line and the bottom gate electrode, or the data line and the top gate electrode are located at a same metal layer. Because the data line and the bottom gate (or the top gate) electrodes are located at a same metal layer, and through one photolithography for patterning to reduce the number of the mask, decrease the production cost. Besides, the stability and the response speed are increased.
Public/Granted literature
- US20180212061A1 DUAL GATE OXIDE THIN-FILM TRANSISTOR AND MANUFACTURING METHOD FOR THE SAME Public/Granted day:2018-07-26
Information query
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