Invention Grant
- Patent Title: Carrying method and bonding apparatus
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Application No.: US14945959Application Date: 2015-11-19
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Publication No.: US10239211B2Publication Date: 2019-03-26
- Inventor: Kimihiro Nakada , Shigeru Kato
- Applicant: Tokyo Ohka Kogyo Co., Ltd.
- Applicant Address: JP Kawasaki-Shi
- Assignee: TOKYO OHKA KOGYO CO., LTD.
- Current Assignee: TOKYO OHKA KOGYO CO., LTD.
- Current Assignee Address: JP Kawasaki-Shi
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: JP2014-245407 20141203
- Main IPC: H01L21/677
- IPC: H01L21/677 ; B25J9/16 ; H01L21/683 ; H01L21/687 ; B32B38/18 ; B32B41/00 ; B32B37/06 ; B32B37/10 ; B32B37/00
Abstract:
A laminate is directly transferred from a first robot arm that carries the laminate from a bonding chamber to an overlapping chamber, to a second robot arm that carries out the laminate from the overlapping chamber to the outside.
Public/Granted literature
- US20160158939A1 CARRYING METHOD AND BONDING APPARATUS Public/Granted day:2016-06-09
Information query
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