Diaphragm check valves and methods of manufacture thereof
Abstract:
Microscale valves for use in, e.g., micropump devices, may be formed of a slitted diaphragm bonded o the interior of a valve tube. A bump in the diaphragm and/or a backward-leakage stopper may increase the breakdown pressure of the valve. A push-rod may be used to pre-load the valve membrane to thereby increase the cracking pressure.
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