- Patent Title: Method for studying a zone of an object so as to determine a mass-thickness and a composition thereof by using an electron beam and measurements of X-ray radiation intensity
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Application No.: US14966932Application Date: 2015-12-11
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Publication No.: US10240918B2Publication Date: 2019-03-26
- Inventor: Eric Robin
- Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Applicant Address: FR Paris
- Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee Address: FR Paris
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: FR1462333 20141212
- Main IPC: G01B15/02
- IPC: G01B15/02 ; G01N23/2252 ; H01J37/244 ; H01J37/285

Abstract:
A method for studying a zone of an object, the zone exhibiting a mass-thickness and comprising at least one chemical element, the method including a step of exposing a part of the zone of the object to an electron beam, a step of identifying each chemical element present in the said zone by virtue of the exposure step, a step of measuring, for each chemical element identified, a corresponding intensity of an X-ray radiation emergent from the object on account of the said exposure step, a step of determining a value of the said mass-thickness dependent on each measurement step, and a step of determining a value of the concentration of each chemical element identified using the said value of the mass-thickness determined.
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